3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching
نویسندگان
چکیده
منابع مشابه
Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
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ژورنال
عنوان ژورنال: MATEC Web of Conferences
سال: 2015
ISSN: 2261-236X
DOI: 10.1051/matecconf/20153202003